Lyncee Tec 高速光学三维质量检测仪
On-flight measurement up to 15 cm/s
3D Optical Inspection by DHM® is a unique 3D imaging solution compatible with production environment. DHM® allows optical inspection of 3D topography, surface finish, defect detection of moving samples at high throughput on production floors, in presence of environmental noise and vibration.
Measurement on Production Floor
Sample displacement up to 35 cm/s
Measurement rate up to 100 Hz
No need of anti-vibration working station
Numerical Reconstruction
Digital sample focusing without mechanical adjustment
Tilt-tip correction performed digitally
3D measurement with metrological precision and stability
Traceability : intrinsic vertical calibration
Reliable instrument : no complex scanning mechanism
Saw marks detection on a solar wafer 1 wafer per second, measurement area 5 mm x 150 mm
High throughput measurement is possible with DHM® unique non-scanning technology. DHM® high acquisition rate enables measurement of a large quantity of samples and products directly on the production line. DHM® short acquisition time makes the system robust against vibrations.
DHM® is a reliable system with low maintenance costs since there is no complex scanning mechanism inside the microscope. DHM® intrinsic vertical calibration makes the vertical measurement accurate over time.
Depending on user needs, DHM® are mount on a standard column or integrated on user’s infrastructure (conveyor tray, gantry). Such system is usually customized and dedicated to a specific inspection. DHM® can be controlled by the TCP/IP software module enabling control of all the acquisition and analysis function of DHM®.
Nanometer faster than ever
DHM® is the only technology providing a reliable 3D measurement at high throughput. 3D Optical Inspection offers you significant benefits in terms of production quality, time saving and innovation.
Save time & cost through…
Detect failure early in the process and avoid expensive recalls
Reduce your maintenance costs, use DHM® instrument that has an intrinsically stable reference and requires only limited calibration
Have long MTBF (mean time between failure) thanks to the absence of complex scanning mechanism
Innovate to keep your competitive advantages
Be a pioneer making 3D measurement at high throughput and on production floor
Access a new dimension with unique DHM® optical information, all DHM® innovative solutions are compatible with industrial inspection
Control roughness according to ISO standard
Measure areas larger than the field of view with fast and automated stitching
Use an instrument adapted to the industrial environment
Ease of automation and integration in your IT production system
Limited training required as the system is adapted to production operator use
Modular DHM® head can be mounted on your production line or integrated in your instrument
3D measurement on production floor thanks to the robust and reliable system
Application Cases
For industrial 3D optical inspection, the first system installed by Lyncée Tec was dedicated to quality control in the watch industry. An important step has been achieved in 2010 by demonstrating measurement on a convey tray, i.e measurements without stopping the sample, and without any mechanical adjustment of the height of the sample for focalization.
DHM® is currently used for 3D optical inspection in semiconductor, medical technology, watch, and solar industries, for controlling among others the following features:
Topography
Roughness measurement according to ISO standard
Step height of SiO2 on Si wafers
Sample’s aesthetic control
Roughness inspection according to ISO standard