Lyncee Tec Lens-Less sensor无透镜传感器

The Lens-less sensor is a fixed field of view DHM®, this unique patented design is robust and ideal for industrial applications.  The reflection configuration measures 3D topography with a sub-nanometric resolution.

Digital holography offers significant advantages compare to others 3D optical profilometer :

• Fast measurement

• Insensitive to surrounding vibrations

• Digital focalization : doesn’t require mechanical displacement

• The laser wavelength is the height reference: no drawbacks from scanning mechanisms

Ideal for automation

• Compact design for easy integration

• Camera outside of the main body for easy maintenance

• External laser source for easy integration and maintenance

Adapted to your needs

• Single or dual wavelength configuration

• Long coherence laser source on request

• High resolution sensor on request

Automated lens-less sensor for wafer inspection

Specifications

• Field of view : 6mm x 6mm

• Lateral resolution : 10 um

• Vertical resolution : 0.5 nm

• Working distance : 10 mm

• Acceptance angle : 0.8°

• CMOS Camera : 4 Mpx